Nitriding in a cyclically switched glow discharge

The paper shows the prospects of nitriding in a cyclically switched discharge, classification processes glow discharge according to criteria characteristics power source is given. A comparison advantages and disadvantages with constant given.From theoretical point view, process considered based on concept an energy model. In accordance this model, tasks for further experimental research are formulated. It shown that surface modification opens up new possibilities associated variants CSD itself, which characterized by: frequency, period pulse shape. implementation adjusting switching pitch - ratio cycle duration signal, shape signal itself wide opportunities significantly influence results treatment.
 kinetics its studying itself. presence surges at beginning end cycles can, principle, affect both nature structure phase composition modified layer, since short-term sufficiently powerful voltage should lead intensive sputtering. destruction monolayer nitrides, has just formed surface, will contribute increase depth nitrided layer due diffusion nitrogen particles, as well certain extent leveling off blocking effect nitride layers.